JPH0189454U - - Google Patents
Info
- Publication number
- JPH0189454U JPH0189454U JP18512587U JP18512587U JPH0189454U JP H0189454 U JPH0189454 U JP H0189454U JP 18512587 U JP18512587 U JP 18512587U JP 18512587 U JP18512587 U JP 18512587U JP H0189454 U JPH0189454 U JP H0189454U
- Authority
- JP
- Japan
- Prior art keywords
- plate
- ion source
- beam irradiation
- irradiation position
- primary beam
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Electron Tubes For Measurement (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18512587U JPH0189454U (en]) | 1987-12-04 | 1987-12-04 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18512587U JPH0189454U (en]) | 1987-12-04 | 1987-12-04 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0189454U true JPH0189454U (en]) | 1989-06-13 |
Family
ID=31476453
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18512587U Pending JPH0189454U (en]) | 1987-12-04 | 1987-12-04 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0189454U (en]) |
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1987
- 1987-12-04 JP JP18512587U patent/JPH0189454U/ja active Pending